Young Shin Quartz


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Quartz Fin Pedestal used for ALD/LPCVD/Diffusion Process

Quartz fin pedestal is used as a prop for quartz boat and takes an important role of helping uniform deposition of thin film on the surface of wafer by maintaining a constant temperature in the process through blocking of heat and light.

Product Features

This product is manufactured through thermoforming and welding processes performed under working environment of cleanliness class 10,000 or higher and cleaning by ultrapure water (18 MΩ). Inspection, cleaning before shipment and packing are also carried out in an inspection room of cleanliness class 1,000 or higher.

This product uses high purity opaque quartz material in order to block heat and light.